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发明名称
摘要
申请公布号	FR2247280(B1)	申请公布日期	1979.02.09
申请号	FR19740033660	申请日期	1974.10.07
申请人	WESTERN ELECTRIC CY INC	发明人
分类号	C01B33/12;C23F1/10;C23F11/04;C23F11/14;G03F7/30;H01L21/00;H01L21/308;H01L21/311;(IPC1-7):B01J1/00;H01L21/30	主分类号	C01B33/12
代理机构		代理人
主权项
地址

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