发明名称 |
Single crystal zone melting attachment - with swivelling extension arm controlled by bimetal strip |
摘要 |
<p>The parent patent describes a device for the crucible-less zone melting of a semiconductor rod and a support for the holder of the seed crystal. Novelty is that each of the three support arms is articulated. In the position of rest they have the length of a basic arm. Application of heat causes a bimetal strip to release the hinged part and a spiral spring tends to extend the arm in the direction of the rod cone. This creates a better support for very long and thick silicon single crystals, free from dislocations, during a crucible-less zone melting operation.</p> |
申请公布号 |
DE2733896(A1) |
申请公布日期 |
1979.02.08 |
申请号 |
DE19772733896 |
申请日期 |
1977.07.27 |
申请人 |
SIEMENS AG |
发明人 |
KELLER,WOLFGANG,DR.RER.NAT. |
分类号 |
C30B13/28;(IPC1-7):01J17/10 |
主分类号 |
C30B13/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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