| 摘要 |
An apparatus for making electrical contact with plural test points on one of two oppositely facing sides of a planar test member. A test member support has a test member test location. A door is provided for opening and closing access to the test location. The door and support form, when the door is closed, a substantially closed cavity therebetween encompassing the test location. The door and the support each comprise one of two opposing walls of the cavity. An array of relatively spaced electrically conductive probes are mounted in and extend through the wall of the support. Each of the probes has an end exposed exterior to the cavity and a probe head electrically connected on the opposite end which is exposed in the cavity. The probe heads are each resiliently biased away from the wall of the support to a substantially common plane and are movable under pressure towards the wall of the support. The door includes a resilient seal extending around the perimeter of the cavity, between the wall of the door and the support, when the door is closed to thereby form a seal for the cavity and resiliently mount the wall of the door with respect to the support. A vacuum port extends through the support to the cavity. The wall of the door is operable, responsive to vacuum applied in the cavity, for deforming the resilient seal applying a substantially uniform pressure against a side of the test member and thereby applying pressure through the test member to the probe heads. The probe heads move under the pressure until all probe heads make electrical contact with the test member.
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