| 摘要 |
PURPOSE:To improve saturation magnetic flux density to a greater extent and to permit narrowing of a gap by using thin soft magnetic Fe-Ga-Si films for thin magnetic films to constitute a magnetic circuit. CONSTITUTION:At least either of the lower magnetic film 11 and upper magnetic film 8 of a thin film magnetic head formed by laminating the lower magnetic film 11, coil conductors 3, 6 and the upper magnetic film 8 via insulating films 2, 4, 7 on a substrate 1 is formed of the thin soft magnetic Fe-Ga-Si film. The thin soft magnetic Fe-Ga-Si film substantially prevents the generation of head satn. and permits the consequent narrowing of the head gap as said film has about 1,300 gauss saturation magnetic flux density larger than the saturation magnetic flux density (1,100 gauss) of an Fe-Al-Si alloy. The coefft. of thermal expansion thereof is about 130X10<-7>/ deg.C and is fairly approximate to the coefft. of thermal expansion (115-120X10<-7>/ deg.C) of the substrate (Mn-Zn ferrite); therefore, the generation of warpage in the substrate in the process of forming the head is obviated. |
