| 发明名称 |
FORMING METHOD OF CHARGE GUIDE LAYER FOR CHARGE TRANSFER DEVICE |
| 摘要 |
PURPOSE:To prevent the deterioration in the transfer efficiency based on the alignment error and to form the transfer path of meandering shape, by forming the charge guide layer with self-alignment method. |
| 申请公布号 |
JPS5414178(A) |
申请公布日期 |
1979.02.02 |
| 申请号 |
JP19770080264 |
申请日期 |
1977.07.04 |
| 申请人 |
FUJITSU LTD |
发明人 |
TANIGAWA KUNIHIRO |
| 分类号 |
H01L29/762;H01L21/265;H01L21/339;H01L21/8234;H01L29/417 |
主分类号 |
H01L29/762 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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