| 发明名称 |
INSPECTING METHOD OF ORIENTATION FLAT BEARING OF LITHIUM TANTALATE XXPLATE WAFERS |
| 摘要 |
<p>PURPOSE:To achieve volume production at high yield and efficiency by rapidly and accurately inspecting orientation direction based on the cleavage plane of an X-plate after slicing to the X-plate.</p> |
| 申请公布号 |
JPS5413789(A) |
申请公布日期 |
1979.02.01 |
| 申请号 |
JP19770079035 |
申请日期 |
1977.07.04 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
MATSUMURA SADAO |
| 分类号 |
H01L41/22 |
主分类号 |
H01L41/22 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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