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发明名称
FORMATION OF FINE ELECTRODE
摘要
申请公布号
JPH0278222(A)
申请公布日期
1990.03.19
申请号
JP19880230344
申请日期
1988.09.13
申请人
NEC CORP
发明人
ONDA KAZUHIKO
分类号
H01L29/812;H01L21/027;H01L21/28;H01L21/338;H01L29/41
主分类号
H01L29/812
代理机构
代理人
主权项
地址
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