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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5412685(A)
申请公布日期
1979.01.30
申请号
JP19770078746
申请日期
1977.06.30
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HIRAO TAKASHI;TSUJI KAZUHIKO;INOUE KAORU;TAKAYANAGI SHIGETOSHI
分类号
H01L21/76
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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