| 摘要 |
PURPOSE: To adapt a point for irradiation with energy to a workpiece surface as desired by controlling the adjusting elements that reflection mirrors possess according to the prescribed geometry of the point for irradiation with the energy on the workpiece surface by a controller for deforming the cross-sectional shape of the beam. CONSTITUTION: An irradiation apparatus 11 for processing the surface 12 of the workpiece 13 has the plural reflection mirrors 14, 1, 14, 2 in a beam route 15 between a laser source 16 and the workpiece 13. At least one thereof is provided with the adjusting elements 17, 1, 17, 2 for the local change of the rugged shapes of mirror finished surfaces 18, 1, 18, 2. The controller 21 for the deformation of the cross-sectional shape of the beam 19' is additionally provided with an image pickup device for detecting the point 20 for the instantaneous irradiation with the beam on the workpiece surface 12, an actual value detector 23 and a feedback circuit 24. The adjusting elements 17 are controlled according to the prescribed shape of the point 20 for the irradiation with the beam on the workpiece surface 12 by the controller described above or the like, by which the desired laser beam processing is executed. |
