摘要 |
PURPOSE:To distribute voids uniformly and to reduce variability of piezoelectric properties by a method wherein a metal alkoxide is used as a starting raw material, a gel-like molding is formed by a sol-gel method and the molding is fired. CONSTITUTION:Lead alkoxide, zirconium alkoxide and titanium alkoxide are used as starting raw materials; a gel-like molding is first obtained by a sol-gel method while a titanate zirconate is used as a solid phase. Then, this gel-like molding is fired at its original firing temperature. Accordingly, a liquid in the gel-like molding is evaporated by heat during its firing operation; voids are formed in its traces; a porous piezoelectric material is obtained. Since the sol-gel method is used, a size in the solid phase is fine and uniform; its dispersion state becomes uniform. |