发明名称 Method of manufacturing a semiconductor device
摘要 The invention relates to a method of manufacturing a semiconductor device in which a compound consisting of at least two semiconductor materials and having an energy gap which is smaller than that of a substrate is deposited epitaxially on the substrate. According to the invention, the composition of the mixture is determined during the deposition by means of measurement of the thermal emission.
申请公布号 US4137122(A) 申请公布日期 1979.01.30
申请号 US19770795733 申请日期 1977.05.11
申请人 U.S. PHILIPS CORPORATION 发明人 ACKET, GERARD A.
分类号 H01L33/00;H01L21/205;(IPC1-7):H01L21/66;G01N21/02 主分类号 H01L33/00
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