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经营范围
发明名称
SURFACE TREATMENT UNIT
摘要
申请公布号
JPS5411669(A)
申请公布日期
1979.01.27
申请号
JP19770076992
申请日期
1977.06.27
申请人
NIPPON ELECTRIC CO
发明人
BONSHIHARA MANABU
分类号
H01L23/50;H01L21/48;H01L21/60;H01L21/68;H01L23/48
主分类号
H01L23/50
代理机构
代理人
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地址
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