发明名称 METHOD FOR MOUNTING DUSTPROOF FILM
摘要 PURPOSE:To easily peel a frame adhered at the time of exchanging dustproof films by forming polyvinyl alcohol (PVA) films on the front surfaces of the mask to be dustproofed prior to adhesion of the frame. CONSTITUTION:The PVA films 5 are formed on both surfaces of the reticule mask 1 and the frame 2 enclosing the four sides of the reticule mask 1 is adhered to the reticule mask 1 with the PVA films 5 in-between. The dustproof films 3 consisting of nitrocellulose are spread and adhered on the end faces on the opposite sides of the frame 2. The PVA films 5 and the dustproof films 3 allow the good passage of light so that the functions of the reticule mask are maintained without being hindered. The frame is easily peeled together with an adhesive agent by immersing the mask into water at the time of exchanging the dustproof masks in this way. The deformation of the frame and the damage of the mask surface or the troubles, such as contamination, by the adhesive agent are thus eliminated.
申请公布号 JPH02135346(A) 申请公布日期 1990.05.24
申请号 JP19880289213 申请日期 1988.11.16
申请人 FUJITSU LTD 发明人 MATSUYAMA TAKAYOSHI;TAKAHASHI TAKAO;KAMIMURA MITSUGI;ARIGA TAKASHI;YOSHIMOTO EIJI;FUTAMURA SEIYA;MORIJIRI MASARU
分类号 G03F1/14;H01L21/027;H01L21/30 主分类号 G03F1/14
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