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发明名称
摘要
申请公布号
DE2413211(C3)
申请公布日期
1979.01.25
申请号
DE19742413211
申请日期
1974.03.19
申请人
SIEMENS AG, 1000 BERLIN UND 8000 MUENCHEN
发明人
BURTSCHER, JOACHIM, DIPL.-ING. DR.;EMEIS, REIMER, DIPL.-PHYS. DR.;KELLER, WOLFGANG, DR.;REUSCHEL, KONRAD, DIPL.-CHEM. DR., 8011 VATERSTETTEN
分类号
C30B31/18;H01L21/00;(IPC1-7):B01J17/34
主分类号
C30B31/18
代理机构
代理人
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