VORRICHTUNG ZUM TIEGELFREIEN ZONENSCHMELZEN EINES HALBLEITERKRISTALLSTABES

摘要

A crucible zone melting device has a drive for the seed crystal mount which is enclosed in a gastight pro adjacent to the mount. This spot rests on a sliding spindle for the mount which is introduced into a receptacle through gastight seals and which is hollow with means for the supply of a coolant and of the drive medium. The short connection to the mounts makes it possible to pull silicon crystal bars of >50mm dia. and >1m length with a high crystal quality and a specified dopant contact in axial and in radial direction.