MASS FLOWMETER FOR A GASEOUS MEDIUM, FOR EXAMPLE AIR

摘要

A mass flow meter for a gas, for example air, having a measuring lead in which a laminar restriction is incorporated and within which lead are arranged centrally an absolute pressure transducer and a pressure differential transducer each constituted by a diaphragm of a semiconductor material which on one side is provided with electric resistance elements by surface doping with a substance, at least one of said elements constituting a strain gauge.