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发明名称
DEVICE FOR TESTING HIGHHREFLECTION AUTOMATIC ABERRATIONNCORRECTION OPTICAL ELEMENTS AND SYSTEM
摘要
申请公布号
JPS548544(A)
申请公布日期
1979.01.22
申请号
JP19770073797
申请日期
1977.06.21
申请人
ZYGO CORP
发明人
JIYOOJI SHII HAUNTAA;POORU EFU FUOOMAN
分类号
G01M11/00
主分类号
G01M11/00
代理机构
代理人
主权项
地址
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