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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS547879(A)
申请公布日期
1979.01.20
申请号
JP19770073442
申请日期
1977.06.20
申请人
NIPPON ELECTRIC CO
发明人
TOKUYOSHI FUJIKI
分类号
H01L29/73;H01L21/28;H01L21/331;H01L21/8234;H01L27/04;H01L27/06;H01L29/72
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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