发明名称 |
MANUFACTURING APPARATUS FOR THIN FILM OF IIIVI GROUP COMPOUNDS |
摘要 |
PURPOSE:The above mentioned apparatus, being able to discriminate the chemical quantitative constitution with a small error without being affected by the temperature of substrate, by measuring the intensity of reflection vapor current from the substrate of composing element of II-VI group compounds and controlling the incidence vapor current of composing element by the above information. |
申请公布号 |
JPS546879(A) |
申请公布日期 |
1979.01.19 |
申请号 |
JP19770073603 |
申请日期 |
1977.06.20 |
申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
CHIKAMURA TAKAO;FUJIWARA SHINJI;FUKAI SHIYOUICHI |
分类号 |
C23C14/06;C23C14/24;C23C14/54 |
主分类号 |
C23C14/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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