发明名称 CONTINUOUS VAPOR DEPOSITION APPARATUS
摘要 PURPOSE:Continuous vapor deposition apparatus, being able to form the multilayer evaporation film on the belt-shaped body in one process, by providing the evaporation source more than one and heating apparatus in conveying room used for only conveyance system at the well-known continuous vapor deposition apparatus.
申请公布号 JPS546878(A) 申请公布日期 1979.01.19
申请号 JP19770073104 申请日期 1977.06.20
申请人 FUJI PHOTO FILM CO LTD 发明人 YOSHIDA SATOSHI;TAKEUCHI HIDEAKI;SHIGIYOU MASAJI;IIJIMA TOSHIO;IKEDA TOMOAKI
分类号 C23C14/56 主分类号 C23C14/56
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