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发明名称
VAKUUM-BEDAMPFUNGSEINRICHTUNG
摘要
申请公布号
DE2828651(A1)
申请公布日期
1979.01.18
申请号
DE19782828651
申请日期
1978.06.29
申请人
HITACHI,LTD.
发明人
NONAKA,YASUHIKO
分类号
C23C14/54;G05D5/03;(IPC1-7):C23C13/08;C23C15/00
主分类号
C23C14/54
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代理人
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