| 摘要 |
PURPOSE:To enable the formation of second electrodes with good dimensional accuracy by first baking the first electrodes and insulating layer formed on an insulating substrate, then forming the second electrodes. CONSTITUTION:The plural driving electrodes 3a, 3b... are formed on the insulating substrate 2 consisting of a ceramic material prior to baking and the first insulating layer 4 is laminated on the insulating substrate 2 formed with the driving electrodes 3a, 3b...; thereafter, the respective members are baked. The plural control electrodes 5a, 5b... and the second insulating layer 9 are successively formed on the baked first insulating substrate and thereafter, the respective members are baked and a screen electrode 11 mounted in the final is provided. The insulating substrate 2 which is shrunk drastically by the baking stage and the driving electrodes 3a, 3b... and first insulating layer 4 formed on such insulating substrate 2 are first baked and thereafter, the control electrodes 5a, 5b... and the second insulating layer 9 are formed. Then, the dimensional change of the insulating substrate 2 at the time of forming the control electrodes 5a, 5b... is obviated. |
