ROTARY LIQUID CHEMICALS TREATMENT DEVICE

摘要

PURPOSE:To easily and surely prevent the leakage of a washing liquid and efficiently execute the washing by boring an inner cup with a hollow hole penetrating the cup in its vertical direction at the center of rotation of the cup and inserting a washing liquid nozzle mounted at a fixed block apart a spacing therefrom into this hole. CONSTITUTION:A suction chuck 7 set with a work W and the inner cup 5 are engaged with each other and thereafter, both are integrally rotated to uniformly diffuse a film liquid at the time of applying the film liquid on the surface of the work W. On the other hand, the inner cup 5 is rotated and a washing liquid is ejected out of the washing liquid nozzle at the time of washing the inner cup 5 and the cap 35 thereof. In such a case, the washing nozzle 12 is mounted at the block 11 fixed to a lifting body 9 supporting the suction chuck 7 via a spinner shaft 8. The washing liquid nozzle 12 is inserted apart the prescribed spacing into the hollow hole 13 which is the inner peripheral surface of the spinner shaft 8. As a result, the need for rotating the washing liquid nozzle 12 is eliminated and one need for sealing 18 obviated.