| 发明名称 |
SOLID SURFACE ELEMENT ANALYZER |
| 摘要 |
PURPOSE:To enable surface analysis of specimen by charge beam radiation to be performed with high sensitivity by lowering the solid surface by a circulating type cooling system. |
| 申请公布号 |
JPS543594(A) |
申请公布日期 |
1979.01.11 |
| 申请号 |
JP19770067898 |
申请日期 |
1977.06.10 |
| 申请人 |
HITACHI LTD |
发明人 |
DOI HIROSHI;SHIKAMATA ICHIROU;HAYAKAWA KAZUNOBU;KAWASE SUSUMU;ICHIKAWA MASAKAZU |
| 分类号 |
G01N23/225;H01J37/252 |
主分类号 |
G01N23/225 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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