| 发明名称 |
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| 摘要 |
<p>1316711 Silica layer MULLARD Ltd 15 March 1971 6884/71 Heading ClA [Also in Divisions C3 and Hl] A layer of silica on substrate is produced by coating the substrate with a mixture of cyclic tri- and tetrasiloxanes, and heating to decompose the coating. The mixture of siloxanes may be obtained by hydrolysing methyltrichlorosilane. The heating may be effected in N 2 , vacuum, O 2 or air, e.g. at 600‹ C. Before heating, the layer is partially irradiated with an electron beam, and the irradiated parts etched.</p> |
| 申请公布号 |
DE2211875(B2) |
申请公布日期 |
1979.01.11 |
| 申请号 |
DE19722211875 |
申请日期 |
1972.03.11 |
| 申请人 |
N.V. PHILIPS' GLOEILAMPENFABRIEKEN, EINDHOVEN (NIEDERLANDE) |
发明人 |
MARTIN, BARRY FORESTER, BURGESS HILL, SUSSEX;ROBERTS, EDWARD DAVID, PURLEY, SURREY |
| 分类号 |
H01L21/316;H01L23/29;(IPC1-7):B01J17/34 |
主分类号 |
H01L21/316 |
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| 地址 |
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