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发明名称
ION INJECTING DEVICE
摘要
申请公布号
JPS543475(A)
申请公布日期
1979.01.11
申请号
JP19770067899
申请日期
1977.06.10
申请人
HITACHI LTD
发明人
DOI HIROSHI;SAKUMICHI KUNIYUKI
分类号
H01J37/317;H01J37/30;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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