| 发明名称 |
MANUFACTURE OF SEMICONDUCTOR DEVICE |
| 摘要 |
PURPOSE:To drill a window to the film of the same material as the substrate without forming the concavity on the substrate surface by making use of the difference of the etching velocity. |
| 申请公布号 |
JPS543478(A) |
申请公布日期 |
1979.01.11 |
| 申请号 |
JP19770068584 |
申请日期 |
1977.06.09 |
| 申请人 |
MATSUSHITA ELECTRONICS CORP |
发明人 |
TSUDA NAOYUKI |
| 分类号 |
H01L29/47;H01L29/872 |
主分类号 |
H01L29/47 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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