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发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS542066(A)
申请公布日期
1979.01.09
申请号
JP19770067164
申请日期
1977.06.06
申请人
NIPPON ELECTRIC CO
发明人
NAKAMURA MASARU
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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