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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54886(A)
申请公布日期
1979.01.06
申请号
JP19770065982
申请日期
1977.06.03
申请人
MITSUBISHI ELECTRIC CORP
发明人
WATAKABE YAICHIROU
分类号
H01L29/80;H01L21/306;H01L21/308;H01L29/06
主分类号
H01L29/80
代理机构
代理人
主权项
地址
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