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经营范围
发明名称
XXRAY EXPOSING METHOD
摘要
申请公布号
JPS53149766(A)
申请公布日期
1978.12.27
申请号
JP19770065226
申请日期
1977.06.02
申请人
SONY CORP
发明人
NAKANE YASUAKI;MIFUNE TADAYOSHI;MORI IWAO
分类号
G03F7/20;H01L21/027;H01L21/302;H05G1/00;H05G1/02
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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