发明名称 Short-channel V-groove complementary MOS device
摘要 An improved short-channel complementary MOS transistor structure is provided. The problems of low punch-through voltage breakdown, and "short-channel effects" are particularly addressed and solved. Accurate and precise field protection of all area surrounding the channel, source and drain regions of both the p-channel MOS transistor device and the n-channel transistor device is simply and effectively accomplished. The threshold voltage of the n-channel MOS transistor device is precisely controlled by a boron implantation.
申请公布号 US4131907(A) 申请公布日期 1978.12.26
申请号 US19770837613 申请日期 1977.09.28
申请人 OUYANG, PAUL H. 发明人 OUYANG, PAUL H.
分类号 H01L21/8238;H01L27/092;(IPC1-7):H01L27/02 主分类号 H01L21/8238
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