发明名称 |
Method of producing echelette gratings |
摘要 |
Disclosed is a method of producing echelette gratings using a beam of electrically charged particles to bomber a masked substrate. The shape and blazed angle " delta " of the echelette grating is controlled by putting the substrate at a selected slant angle " theta " with regard to the beam of electrically charged particles.
|
申请公布号 |
US4131506(A) |
申请公布日期 |
1978.12.26 |
申请号 |
US19760750914 |
申请日期 |
1976.12.15 |
申请人 |
RIKAGAKU KENKYUSHO |
发明人 |
NAMBA, SUSUMU;AOYAGI, YOSHINOBU |
分类号 |
G01J3/18;G02B5/18;(IPC1-7):H01L21/30;B44C1/22;C03C25/06 |
主分类号 |
G01J3/18 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|