ELECTRON BEAM EXPOSURE METHOD,申请号JP19770060132-传众专利搜索

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发明名称	ELECTRON BEAM EXPOSURE METHOD
摘要
申请公布号	JPS53145477(A)	申请公布日期	1978.12.18
申请号	JP19770060132	申请日期	1977.05.24
申请人	NIPPON ELECTRON OPTICS LAB;RIKAGAKU KENKYUSHO	发明人	GOTOU HIDEKAZU;SOUMA TAKASHI;IDESAWA MASANORI;MIYAUCHI SAKAE
分类号	H01L21/027;H01L21/26	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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