PRODUCTION OF ELECTRON BEAM MASK,申请号JP19770058881-传众专利搜索

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发明名称	PRODUCTION OF ELECTRON BEAM MASK
摘要
申请公布号	JPS53144679(A)	申请公布日期	1978.12.16
申请号	JP19770058881	申请日期	1977.05.23
申请人	NIPPON TELEGRAPH & TELEPHONE	发明人	TAKAMOTO KIICHI;KOYABU KUNIO;MIMURA YOSHIAKI;YOSHIHARA HIDEO
分类号	H01L21/027;H01L21/302	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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