| 发明名称 |
AUTOMATIC POSITIONING DEVICE OF PATTERN |
| 摘要 |
PURPOSE:To position automaticaly in a simple constituent by the use of a television camera in a positioning device thereat the position of the pattern is regularly lined up at the flat surface. |
| 申请公布号 |
JPS53143877(A) |
申请公布日期 |
1978.12.14 |
| 申请号 |
JP19770058961 |
申请日期 |
1977.05.21 |
| 申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
MATSUI HIDEO |
| 分类号 |
H01L21/30;B41F33/00;B41F33/14;G03F9/00;G05D3/00;G05D3/12;H01L21/027;H01L21/68 |
主分类号 |
H01L21/30 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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