| 摘要 |
PURPOSE:To perform exposure with the desired intensity of an exposure beam by detecting the exposure beam reflected from a photoresist substrate by an optical sensor part provided on a mobile optical system, monitoring and controlling exposure emitted from a head lens. CONSTITUTION:A head position detecting part 12 detects a distance between the rotational center axis of the photoresist substrate 1 in rotating and that of the head lens 9 at the time of performing the exposure. An exposure setting part 4 outputs an exposure setting signal (b) for the head position detecting signal (a) of the detecting part 12. Meanwhile, the intensity of a laser beam 3 emitted from a laser oscillator 2 is adjusted by a light modulator 6, and it is converted to the exposure beam 7, and it is bent by a beam splitter 8, and transmits the head lens 9, then, is projected on the photoresist substrate 1. The optical sensor part 11 on the mobile optical system receives a beam for monitoring reflected on the substrate 1. At this time, a light modulation driving part 5 adjusts and outputs a light modulator driving signal (d) so as to align the signal (b) with an optical sensor output signal (c), and adjusts the intensity of the beam 3 by driving the modulator 6. |
