REACTIVE SPUTTER ETCHING METHOD,申请号JP19770059144-传众专利搜索

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发明名称	REACTIVE SPUTTER ETCHING METHOD
摘要
申请公布号	JPS53142939(A)	申请公布日期	1978.12.13
申请号	JP19770059144	申请日期	1977.05.20
申请人	NIPPON ELECTRIC CO	发明人	TAJIMA MASAO;KUROKI YUKINORI
分类号	H05K3/08;C23F1/02;C23F4/00;H01L21/302;H05K3/06	主分类号	H05K3/08
代理机构		代理人
主权项
地址

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