发明名称 GLOW DISCHARGE SURFACE TREATING APPARATUS
摘要 PURPOSE:To provide the title apparatus in which heat loss is reduced, high temp. treatment can by carried out, and many parts of different shapes can be treated in the same vessel by providing other carthode of a predetermined area behind a cathode opposite to an anode.
申请公布号 JPS53142334(A) 申请公布日期 1978.12.12
申请号 JP19770056342 申请日期 1977.05.18
申请人 HITACHI LTD 发明人 ASAHI NAOTATSU;YAMAGUCHI SHIZUKA
分类号 C23C8/36 主分类号 C23C8/36
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