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经营范围
发明名称
CHARGE PARTICLE BEAM WORKING DEVICE
摘要
申请公布号
JPS53141996(A)
申请公布日期
1978.12.11
申请号
JP19770057391
申请日期
1977.05.18
申请人
OSAKA TRANSFORMER CO LTD
发明人
OKADA AKIYUKI
分类号
H01J37/30;B23K15/00;B23K15/06
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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