发明名称 TRIMMING OF TEMPERATURE-SENSOR IC WAFER
摘要 PURPOSE:To trim a temperature-sensor IC chip by a method wherein a temperature is computed on the basis of a difference between the following two voltages and this temperature is used as a temperature reference: two monitor transistors are connected in parallel, a definite electric current flows to them and a base-to- emitter voltage is found; the same definite electric current flows to only one monitor transistor and a base-to-emitter voltage is found. CONSTITUTION:Two monitor transistors 31, 32 whose performance is identical and where a collector and a base are short-circuited individually are formed in a temperature-sensor IC chip 3 in a process to form the monitor transistors. The transistors 31, 32 are connected in parallel in a process to decide a temperature reference. A definite electric current IO flows to the parallelconnected transistors 31, 32; a base-to-emitter voltage VBE1 is found; then, the same definite electric current IO flows to only the transistor 31; a base-to-emitter voltage VBE2 is found; a temperature is computed on the basis of a difference between both base-to-emitter voltages VBE1, VBE2; said temperature sensor IC is trimmed by using this temperature as the temperature reference.
申请公布号 JPH02156653(A) 申请公布日期 1990.06.15
申请号 JP19880311289 申请日期 1988.12.09
申请人 YOKOGAWA ELECTRIC CORP 发明人 TAGUCHI KAZUO
分类号 G01K7/01;G01K7/00;H01L21/66;H01L21/82;H01L21/822;H01L27/04 主分类号 G01K7/01
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