Energy analyzer for charged particles

摘要

Apparatus for analyzing the energies of charged particles having an analyzer, a detector and an electrode system. The analyzer generates an electric or magnetic field through which the particles pass, there being an outlet aperture through which the charged particles exit as a beam. The detector is arranged in the path of the beam leaving the analyzer field through the outlet aperture, and the electrode system is arranged between the analyzer and the detector and serves to adjust the cross-section of the particle beam.