发明名称 Vertical replacement-gate junction field-effect transistor
摘要 An architecture for creating a vertical JFET. Generally, an integrated circuit structure includes a semiconductor area with a major surface formed along a plane and a first source/drain doped region formed in the surface. A second doped region forming a channel of different conductivity type than the first region is positioned over the first region. A third doped region is formed over the second doped region having an opposite conductivity type with respect to the second doped region, and forming a source/drain region. A gate is formed over the channel to form a vertical JFET. In an associated method of manufacturing the semiconductor device, a first source/drain region is formed in a semiconductor layer. A field-effect transistor gate region, including a channel and a gate electrode, is formed over the first source/drain region. A second source/drain region is then formed over the channel having the appropriate conductivity type.
申请公布号 US7033877(B2) 申请公布日期 2006.04.25
申请号 US20030723547 申请日期 2003.11.26
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分类号 H01L21/8238;H01L21/332;H01L21/337;H01L21/8232;H01L21/8234;H01L27/06;H01L27/088;H01L27/095;H01L27/098;H01L29/78;H01L29/80;H01L29/808 主分类号 H01L21/8238
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