发明名称 SURFACE TEST DEVICE
摘要 PURPOSE:To eliminate the coherent properties of the laser beam and to detect the surface defect of the sheet material, by providing a scanning light source device which scans the surface sequentially, a reflective diffusion plate, and a condenser lens which condenses the diffusion light and supplies it to a photoelectric conversion device.
申请公布号 JPS53138781(A) 申请公布日期 1978.12.04
申请号 JP19770053923 申请日期 1977.05.10
申请人 MITSUBISHI ELECTRIC CORP 发明人 KAMEI MITSUHITO
分类号 G01B11/30;G01N21/89;G01N21/892 主分类号 G01B11/30
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