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发明名称
DETECTION METHOD FOR DRYYETCHING COMPLETION
摘要
申请公布号
JPS53138276(A)
申请公布日期
1978.12.02
申请号
JP19770052079
申请日期
1977.05.09
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
YANO KENSAKU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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