| 摘要 |
A semiconductor diffusion equipment having a cooling unit is provided to collect impurities contained in a gas flowing through an exhaust tube and to quickly cool the gas using a cooling plate and a cooling pipe. A semiconductor diffusion equipment includes a reaction tube receiving a gas to perform a semiconductor fabricating process, an exhaust tube(110) connected to the reaction tube for exhausting the gas, and a cooling unit(200) installed in the exhaust tube for cooling the gas to collect impurities contained in the gas. The cooling unit has a cooling plate(210) mounted on the exhaust tube and a cooling pipe(220) having one end coupled to the cooling plate and the other end disposed in the exhaust pipe. The cooling plate is made of a thermoelectric element.
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