| 发明名称 |
VACUUM SYSTEM FOR SURFACE TREATMENT |
| 摘要 |
PURPOSE:To prevent deterioration of vacuum pump oil due to halogen or halogen cpd., by providing a trap set in a vacuum system for surface treatemnt with an absorption layer composed of an alkali (-earth) element or a cpd. of these elements. |
| 申请公布号 |
JPS53137085(A) |
申请公布日期 |
1978.11.30 |
| 申请号 |
JP19770050809 |
申请日期 |
1977.05.04 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
MURAKAMI KENJI |
| 分类号 |
H01J37/18;C23C14/24;C23C14/34;C23C14/56;C23C16/44;C23C16/448;C23C16/455;F04B39/16;F04F9/00;F04F9/06;H01J37/317;H01L21/203;H01L21/223;H01L21/265 |
主分类号 |
H01J37/18 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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