发明名称 SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF
摘要 <p>A semiconductor storage device is provided with a charge storage layer (26), which is formed on a semiconductor substrate (10) and has a plurality of particles (16) as charge storage bodies in insulating films (12) and (24), and a gate electrode (30) formed on the charge storage layer (26). The particles (16) are composed of metal oxide or metal nitride.</p>
申请公布号 KR20070059211(A) 申请公布日期 2007.06.11
申请号 KR20077010373 申请日期 2007.05.07
申请人 FUJITSU LIMITED 发明人 SUGIZAKI TARO
分类号 H01L27/115;H01L21/8247;H01L29/792 主分类号 H01L27/115
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