发明名称 AUTOMATIC ALIGNMENT METHOD
摘要 PURPOSE:To drive the junction tool, by the output of arithmetic operation circuit, through operating and compensating the actually measured value of the distance between a plural number of coordinates on a package and the bonding coordinate counting value memorized in advance.
申请公布号 JPS53136479(A) 申请公布日期 1978.11.29
申请号 JP19770050697 申请日期 1977.05.04
申请人 发明人
分类号 H01L21/60;G05D3/00;H01L21/68 主分类号 H01L21/60
代理机构 代理人
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