PRODUCTION APPARATUS FOR PRODUCING GALLIUM NITRIDE FILM SEMICONDUCTOR AND CLEANING APPARATUS FOR EXHAUST GAS,申请号KR20020003566-传众专利搜索

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发明名称	PRODUCTION APPARATUS FOR PRODUCING GALLIUM NITRIDE FILM SEMICONDUCTOR AND CLEANING APPARATUS FOR EXHAUST GAS
摘要
申请公布号	KR100807937(B1)	申请公布日期	2008.02.28
申请号	KR20020003566	申请日期	2002.01.22
申请人		发明人
分类号	C23C16/44;H01L21/205;B01D53/58;C30B25/02;H01L21/02	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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