| 发明名称 |
PHOTOELECTRIC DETECTING OPTICAL DEVICE |
| 摘要 |
PURPOSE:To capture signals of objects at high efficiency and with a good contrast by making the region detected by an image sensor in a singularity or plurality of wires or strips on the object surface by using a special lighting system in an auto-alignment apparatus for production of integrated circuits, etc. |
| 申请公布号 |
JPS53135653(A) |
申请公布日期 |
1978.11.27 |
| 申请号 |
JP19770050605 |
申请日期 |
1977.05.01 |
| 申请人 |
CANON KK |
发明人 |
SUZUKI AKIYOSHI;KANOU ICHIROU;YOSHINARI HIDEKI;TOTSUKA MASAO;HIRAGA RIYOUZOU;KATOU YUUZOU;OGINO YASUO |
| 分类号 |
G01B11/00;G02B21/08;G02B21/10;G02B27/00;G03F9/00;H01L21/00;H01L21/027;H01L21/30 |
主分类号 |
G01B11/00 |
| 代理机构 |
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代理人 |
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| 地址 |
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